000 00563nam a22002057a 4500
003 OSt
005 20230503115019.0
008 230503b |||||||| |||| 00| 0 eng d
020 _a9783662500088
028 _bSPS Books Distributors
_cIN2170
_d26/04/2023
040 _cSJCLIB
100 _aFrey, Hartmut and Khan, Hamid R
_9169738
245 _aHandbook of Thin-Film Technology
260 _aBerlin Heidelberg
_bSpringer
_c2015
300 _a380
600 _tPhysics
_91741
650 _aPhysics
_921273
942 _2ddc
_cREF
999 _c156628
_d156628